Plasma treatments present nowadays an efficient, non-polluting and economical tool for surface functionalization. Therein, the sticking and adhesion of molecules in the sub-monolayer range is of great importance, as this monolayer defines the surface properties in general, and the adhesion properties in the context of reversible adhesion between metal and polymer surfaces. The adhesion during the initial stages of growth is governed by the species in the plasma as well as their energy and angular distributions. In the past, many studies on thin film deposition and surface functionalization have been carried out for the initial monolayers and well beyond. However, the plasma-surface interactions remain largely unexplored. In particular, molecular dynamics (MD) simulation studies of plasma deposited matter in the sub-monolayer range have been reported only for very few applications, while simulation studies on rough surfaces have not been reported at all.In this project, we will use a multidisciplinary approach combining advanced numerical simulations (MD simulations and density-functional theory (DFT) calculations) with experimental techniques for thedeposition (Storing Matter technique, thermal evaporation and plasma processes) and the analysis and characterization of deposits (SIMS, LEIS, LEED, XPS and AFM/SPM under vacuum) to study thedeposition of organic molecules and molecular fragments in the sub-monolayer range. We will target the following objectives: The influence of surface roughness on the sticking of matter on the sample surface• The in fluence of impact energy and incidence angle on adhesion• The dependence of the sticking on the substrate compositionThis project will contribute to a better understanding of the atomic-scale processes in plasma surface functionalization and thus will help improve existing and new surface functionalization processes ingeneral and contribute to the development of plasma-functionalized surfaces for reversible adhesion between aluminium and polymer surfaces. Furthermore, the project will allow to strengthen thecollaboration between Finland and Luxembourg.